Textured membrane for a multi-chamber carrier head

ABSTRACT

A flexible membrane for use in a carrier head has a generally circular main portion with a lower surface, an annular outer portion for connection to a base assembly, and an annular flap extending from the main portion on a side opposite the lower surface for connection to the base assembly. At least one surface of the flap has a surface texture to prevent adhesion.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a divisional of U.S. application Ser. No.14/462,303, filed Aug. 18, 2014, which is a divisional of U.S.application Ser. No. 13/908,774, filed Jun. 3, 2013, which is adivisional of U.S. application Ser. No. 11/614,940, filed Dec. 21, 2006,which claims the benefit of priority of U.S. Provisional ApplicationSer. No. 60/755,742, filed Dec. 29, 2005. The disclosures of the priorapplications are considered part of and is incorporated by reference inthe disclosure of this application.

BACKGROUND

The present invention relates to a chemical mechanical polishing carrierhead that includes a flexible membrane, and associated methods.

Integrated circuits are typically formed on substrates, particularlysilicon wafers, by the sequential deposition of conductive,semiconductive or insulative layers. After each layer is deposited, itis etched to create circuitry features. As a series of layers aresequentially deposited and etched, the outer or uppermost surface of thesubstrate, i.e., the exposed surface of the substrate, becomesincreasingly nonplanar. This nonplanar surface presents problems in thephotolithographic steps of the integrated circuit fabrication process.Therefore, there is a need to periodically planarize the substratesurface.

One accepted method of planarization is chemical mechanical polishing(CMP). This planarization method typically requires that the substratebe mounted on a carrier or polishing head. The exposed surface of thesubstrate is placed against a moving polishing surface, such as arotating polishing pad. The polishing pad may be either a “standard”polishing pad with a durable roughened surface or a “fixed-abrasive”polishing pad with abrasive particles held in a containment media. Thecarrier head provides a controllable load to the substrate to push itagainst the polishing pad. A polishing slurry, including at least onechemically reactive agent, and abrasive particles if a standard pad isused, is supplied to the surface of the polishing pad.

Some carrier heads include a flexible membrane with a mounting surfacethat receives the substrate. A chamber behind the flexible membrane ispressurized to cause the membrane to expand outwardly and apply the loadto the substrate. After polishing, the substrate is chucked to themounting surface, lifted off the polishing pad, and moved to anotherlocation, such as a transfer station or another polishing pad.

SUMMARY

In one aspect, an article for use in a carrier head is described. Thearticle includes a flexible membrane having a generally circular mainportion with a lower surface, an annular outer portion for connection toa base assembly, and an annular flap extending from the main portion ona side opposite the lower surface for connection to the base assembly,wherein at least one surface of the flap has a surface texture toprevent adhesion.

In another aspect, a carrier head is described. The carrier head has abase assembly and a flexible membrane. The flexible membrane has agenerally circular main portion with a lower surface, an annular outerportion for connection to a base assembly, and an annular flap extendingfrom the main portion on a side opposite the lower surface forconnection to the base assembly, wherein at least one surface of theflap has a surface texture to prevent adhesion.

Implementations of the above inventions may include one or more of thefollowing features. A lip portion of the flap can be smoother than aremainder of the flap. An inner surface of the central portion can havethe surface texture. The lower surface of the central portion can havethe surface texture. The surface texture can be a plurality ofprotrusions. The protrusions can be at least 30 microinches in height,such as between about 60 and 80 microinches in height, at least 120microinches or about 0.1 inches in height. The protrusions can bearranged in a regular array or in a random pattern. The protrusions canbe elastically compressible. Both surfaces of the flap can have thesurface texture. The protrusions can be bar shaped or can have rightangles.

In another aspect, the invention is directed to a method of making aflexible membrane for a carrier head. The method includes curing amaterial in a mold to form the flexible membrane having a flap. The moldhas a pattern so that a flap on the flexible membrane has acomplementary pattern that includes a plurality of protrusions.

Implementations of the above inventions may include one or more of thefollowing features. The mold can be sandblasted with sand or glassbeads.

Protrusions on the membrane can create channels alongside theprotrusions through which fluid is able to pass. Thus, if the membranefolds onto itself or flattens against part of the carrier head, fluidcan be pumped through the channel to inflate a chamber defined by themembrane and urge the portions of the membrane away from one another oraway from the carrier head. In a similar membrane that is free ofprotrusions, fluid may not be able to reach the chamber and part of themembrane may stick to itself or to the carrier head. This sticking canprevent desired controlling of substrate polishing. Thus, a membranewith protrusions may enable more reproducible substrate polishing andincrease yield.

The details of one or more implementations of the invention are setforth in the accompanying drawings and the description below. Otherfeatures, objects, and advantages of the invention will be apparent fromthe description and drawings, and from the claims.

DESCRIPTION OF DRAWINGS

FIG. 1 is a cross-sectional view of a carrier head that includes aflexible membrane.

FIG. 2 is an expanded cross-sectional view of the flap of the flexiblemembrane from FIG. 1.

FIGS. 3-6 are cross-sectional views and perspective views of a portionof a flap of the flexible membrane.

Like reference symbols in the various drawings indicate like elements.

DETAILED DESCRIPTION

As noted above, some carrier heads include a flexible membrane thatprovides a mounting surface for a substrate during and between polishingoperations. In addition, in some carrier heads the flexible membraneincludes flaps that provide multiple independently pressurizablechambers. This permits different pressures to be applied to differentradial regions of the substrate during polishing. Unfortunately,sometimes a multi-chamber carrier head will not function reliably inresponse to pressure inputs.

Without being limited to any particular theory, the flaps of theflexible membrane can stick to each other, to the main body of themembrane, or to other parts of the carrier head. This sticking caninterfere with proper and reliable function of the carrier head.

The present invention reduces adhesion by reducing the surface contactarea between the flaps and other portions of the membrane or carrierhead.

FIG. 1 shows a carrier head 100. The carrier head 100 is part of achemical mechanical polishing (CMP) apparatus that is typically used topolish one or more substrates. The carrier head 100 is operable to holda substrate, while the substrate is being polished or being transported.A description of a suitable CMP apparatus can be found in U.S. Pat. No.5,738,574, the entire disclosure of which is incorporated herein byreference.

The carrier head 100 includes a base assembly 104, a retaining ring 110,and a flexible membrane 108. The flexible membrane 108 extends below andis connected to the base 104 to provide a plurality of pressurizablechambers 160, 162, 164, 166. The flexible membrane 108 is operable tohold or release the substrate by changes in a pressure of one or more ofthe chambers.

Although not illustrated, the carrier head can include other elements,for example, a housing from which the base 104 is movably suspended, agimbal mechanism (which may be considered part of the base assembly)that permits the base 104 to pivot, a loading chamber between the base104 and the housing, one or more support structures inside the chamber,or one or more internal membranes that contact the inner surface of themembrane 108 to apply supplemental pressure to the substrate. Forexample, the carrier head 100 can be constructed as described in U.S.Pat. No. 6,857,945, the entire disclosure of which is incorporated byreference.

The flexible membrane 108 is a generally circular sheet formed of aflexible and elastic material, for example, neoprene, chloroprene,ethylene propylene rubber or silicone. The membrane 108 should behydrophobic, durable, and chemically inert vis-à-vis the polishingprocess. The membrane 108 can include a central portion 120 with a lowersurface that provides a mounting surface 124 for a substrate, and anannular edge portion 122. In some embodiments, the annular edge portion122 has extensions that form a lip portion 140 that can be clampedbetween the retaining ring 110 and the base 104 (as shown in FIG. 1).The lip portion 140 can optionally include a thick rim (not shown),which can help secure the membrane between the retaining ring 110 andthe base 104. The central portion 120 can be dimensioned to accept a 200mm diameter substrate or a 300 mm diameter substrate, e.g., the centralportion 120 can be about 200 mm or 300 mm in diameter, or slightlylarger than 200 mm or 300 mm so as to accommodate loading of thesubstrate into the carrier head.

The flexible membrane 108 has one or more flaps 150, 152, 154, extendingfrom the central portion 120, which in part define the chambers. Theflaps are mechanically secured to the base assembly 104, e.g., by aclamping assembly. The volume between the base assembly 104 and themembrane 108 that is sealed by the first flap 150 provides a firstpressurizable chamber 160. In some flap configurations, the portion ofthe mounting surface 124 that corresponds to the first pressurizablechamber 160 is circular. The volume between the base assembly 104 andthe membrane 108 that is sealed between the first flap 150 and thesecond flap 152 provides a second pressurizable chamber 162 surroundingthe first chamber 160. In some flap configurations, the portion of themounting surface 124 that corresponds to the first pressurizable chamber160 is annular. Similarly, the volume between the second flap 152 andthe third flap 154 provides a third pressurizable chamber 164. Thevolume between the third flap 154 and the annular edge portion 122provides a fourth pressurizable chamber 166. As illustrated, theoutermost chamber 166 is the narrowest chamber. In fact, the chamberscan be configured to be successively narrower. However, some flappedmembranes form equally spaced chambers or chambers that becomeprogressively wider from the center of the membrane to the edge.

Each chamber can be fluidly coupled by passages through the baseassembly 104 to an associated pressure source, such as a pump orpressure or vacuum line. This permits different pressures to be appliedto different radial regions of the substrate during polishing, therebycompensating for non-uniform polishing rates caused by other factors orfor non-uniform thickness of the incoming substrate. Although thecarrier head is illustrated with four chamber, the number andconfiguration of flaps could be adjusted to provide just two or threechambers, or five or more chambers.

The mounting surface 124 of the central portion 120 of the membrane 108is textured to reduce adhesion between the membrane and the substrate.The texturing can be located just on the side of the membrane thatprovides the mounting surface, or on both sides of the membrane. Thetexturing can also extend along the inner and/or the outer surface ofthe annular edge portion 122 of the membrane 120. The lip portion 140that is clamped between the retaining ring and base can lack texturing,and thus be smoother than the central portion 120.

In addition, the surfaces of the flaps can be also be textured to reduceadhesion between the flaps and rest of the membrane or the carrier head.Referring to FIG. 2, the surface of the flap 150 is textured with asurface roughness formed by protrusions 130 (in FIG. 2 protrusions 130are somewhat exaggerated for clarity). The texturing can extend alongthe entire length of the flap, or can stop at the portion of the flapthat would be clamped. The texturing can be on both sides of the flap,or only on the side that is more likely to contact other parts of thecarrier head.

The protrusions can be configured to at least partially collapse underpressure. The protrusions can be a variety of possible shapes, such ashemispherical, conical, pyramidal, rectangular or linear, and theprotrusions can end in a point or a plateau. If generally linear, theprotrusions can be a variety of cross-sectional shapes, such assemicircular, triangular or rectangular. On a single flapped membrane,the different protrusions can have different shapes from one another. Onsome flapped membranes, different protrusions can all be generallypyramidal or hemispherical, but have different dimensions. Theprotrusions can be uniformly spaced on the membrane.

Referring to FIGS. 3 and 4, in another embodiment, a single protrusion130′ is formed on the flap 150′. This protrusion is a bar typeprotrusion. In FIGS. 5 and 6, a flap 150″ can have multiple protrusions130′. The protrusion(s) 130′, particularly the linear protrusions, canbe located at and extend across the connection of the vertical portion165 to the horizontal portion 175 of the flap. For example, theprotrusions 130′ can extend radially and be distributed axiallysymmetrically around a center axis of the membrane.

The protrusions are larger than the “microstructure” texturing thatmight be present due to inherent roughness properties of the membranematerial on the microscale. In general, the protrusions should besufficiently large that, in the uncompressed state, the flaps cannotachieve 100% surface area contact with other parts of the carrier head.In addition, the protrusions should be sufficiently large that whenreleased from compression, they provide sufficient resilient force thatthe flap will disengage from the surface that it is contacting.

The protrusions can vary in size considerably. In some implementations,the protrusions can be as small as 10 microinches. In otherimplementations, the protrusions can be as large as 0.1 inches. In oneimplementation, the protrusions are less than 200 microinches in height,e.g., less than 160 microinches in height or less than 120 microinchesin height. For example, the protrusions can be about 60-80 microinchesin height. In some embodiments the protrusions have a length of lessthan about 100 mils and a width of less than about 0.2 inches. In thiscontext, the average size of the protrusions can be determined byconventional roughness-measuring techniques, e.g., profilometers, thatdetermine the surface roughness dimension r_(a).

On some membranes, the protrusions all have the same height. On othermembranes, the some of the protrusion have different heights from oneanother. The protrusions can be arranged on the membrane in a regularpattern, for example, a regularly spaced rectangular array, or they canbe dispersed randomly.

The protrusions can reduce the tendency of the interior surfaces of theflexible membrane, including the flaps, to stick to each other or to thecarrier head, thus improving the reliability of the carrier head.

The surface texture can be created during the molding process, forexample, by curing the membrane in a mold that has a complementarypattern. A mold that will impart a random surface texture to themembrane can be prepared, for example, by sandblasting the mold withsand or glass beads.

The described sandblasting produces a mold with a surface roughness onthe order of 60-80 microinches. In contrast, it may be noted that thesurface microtexture finish F1 as produced from a highly polished steelmold has no defects larger than 10 microinches, whereas the surfacemicrotexture finish F2 has no defects larger than 32 microinches.

Another tactic to reduce adhesion between the membrane and the substrateor other parts of the carrier head, is to limit the amount of bulkviscoelastic extractables, such as plasticizers or antioxidants, in themembrane. Without being limited to any particular theory, these bulkextractables might be able to flow through the membrane surface,creating viscoelastic surface extractables. The viscoelastic surfaceextractables can then flow between the surface of the membrane andsubstrate, filling the interstitial volume and increasing the effectivecontact surface area between the membrane and substrate. Limiting theamount of bulk extractables could reduce the adhesion. For example, ifthe membrane material is a rubber, the bulk extractables could belimited to less than 7% by weight.

The protrusions can form channels for fluid to pass through. This canallow for fluid to enter or exit chambers formed by the membrane.Because fluid can be pumped into or out through the channels, thechambers can be controllably pressurized or depressurized. Protrusionswith square corners, such as right angled corners, may be less likely toconform to other surfaces, such as another portion of the membrane or apart of the carrier head. Thus, squared off protrusions may keep fluidchannels open better than other shaped protrusions, such as roundedprotrusions.

In addition to forming a membrane that is less likely to seal to itselfor to parts of the carrier head when the membrane is collapsed, textureon the flaps or other portions of the membrane that form the interior ofthe chambers can provide other advantages. Texturing on the backside ofthe membrane and on the flaps can prevent air pockets from forming whenthe membrane is collapsed. Air or other fluid is able to escape throughchannels formed between protrusions that contact a surface when thechambers are evacuated. This can assist in chucking and dechuckingprocedures between polishing. An potential advantage of a membrane 108having texture on its outer substrate-mounting surface is that themembrane does not adhere to the surface of the substrate, therebyimproving reliability of the unloading procedure.

A number of embodiments of the invention have been described. Differentmembranes may have texturing only in limited areas, such as on theflaps, or in all areas that could seal to other areas when the chambersare evacuated. In addition to being used on a membrane that is thatcontacts a substrate during polishing, the texture can be added to achamber forming membrane that does not contact a substrate duringpolishing, that is, on an inner membrane of a multi-membrane system,such as the membrane described in U.S. Pat. No. 6,733,965, the entiredisclosure of which is incorporated by reference herein. Nevertheless,it will be understood that various modifications may be made withoutdeparting from the spirit and scope of the invention. Accordingly, otherembodiments are within the scope of the following claims.

1-17. (canceled)
 18. A method of making a flexible membrane for acarrier head, comprising: curing a material in a mold to form theflexible membrane having a flap, the mold having a pattern so that aflap on the flexible membrane has a complementary pattern that includesa plurality of protrusions.
 19. The method of claim 18, furthercomprising sandblasting the mold to provide the pattern.
 20. (canceled)21. The method of claim 19, wherein sandblasting is performed with sandor glass beads.
 22. The method of claim 19, wherein sandblasting forms asurface roughness of about 60-80 microinches on the mold.
 23. The methodof claim 18, wherein the material is a rubber after being cured.
 24. Anarticle for use in a carrier head, comprising: a flexible membranehaving a generally circular main portion with a lower surface, anannular outer portion for connection to a base assembly, and an annularflap extending from the main portion on a side opposite the lowersurface for connection to a base assembly, wherein the flap has ahorizontal first portion and second portion extending downwardly fromthe horizontal portion to the main portion, wherein the flap has aprotrusion projecting from a surface of the flap, and wherein theprotrusion extends along the first portion and the second portion andacross a connection between the first portion and the second portion.25. The article of claim 24, wherein the second portion extendsvertically.
 26. The article of claim 24, wherein the protrusion issubstantially linear.
 27. The article of claim 26, wherein theprotrusion extends radially.
 28. The article of claim 20, wherein theflap includes a plurality of protrusions projecting from a surface ofthe flap.
 29. The article of claim 28, wherein the plurality ofprotrusions have the same height.
 30. The article of claim 28, whereinthe plurality of protrusions are distributed axially symmetricallyaround a center axis of the membrane.
 31. A flexible membrane for acarrier head of a chemical mechanical polishing system, comprising: agenerally circular main portion with an upper surface and a lowersurface to provide a mounting surface for a substrate; an outer annularportion extending upwardly from an outer edge of the main portion, theouter annular portion including a rim to contact and be clamped to thecarrier head; and an annular flap extending upwardly from the uppersurface of the main portion at a position spaced inwardly from the outeredge, the annular flap having an edge portion to contact and be clampedto the carrier head, wherein the membrane includes a flexible andelastic polymer material and a bulk viscoelastic extractable, the bulkviscoelastic extractable comprising no more than 7% of the membrane byweight.
 32. The flexible membrane of claim 24, wherein the polymermaterial includes neoprene, chloroprene, ethylene propylene rubber orsilicone.
 33. The flexible membrane of claim 24, wherein the bulkviscoelastic extractable includes a plasticizer or an antioxidant. 34.The flexible membrane of claim 24, wherein at least one surface of theannular flap has a surface roughness of 60 to 200 microinches.
 35. Theflexible membrane of claim 24, wherein the bulk viscoelasticextractables are able to flow through the mounting surface.